Magnetically Levitated Turbo Molecular Pump
with Integrated Power Supply Unit
The power supply unit is integrated into the pump, so there is no need to install cables or use a control rack. This eliminates troublesome cable routing and reduces the installation space.
Improved Pumping Performance
Especially targeting sputter processes, the pumping speed is significantly improved in the 1 to 5 Pa range.
Refer to brochure for chart details.
Network Connection Enabled
Equipped with RS-232C and RS-485-compatible serial communication ports, which enable operations to start/stop the TMP, monitor operational status, and read out the operational log. Thanks to the optional monitor software, up to 32 TMPs can be monitored using a single computer via RS-485 communications. A Profibus communications option can also be selected.
Environmentally-Friendly, Low Power Consumption
Thanks to improved pumping performance and reduced internal loss, power consumption reductions of up to 25 % are achieved in comparison to conventional models. (TMP-V2304)
Allows Local Operation
Status checks and local operation can be performed using the operation panel It is especially effective during maintenance, since operational checks can
easily be made on-site.
For pricing and answer to your questions, please call our Sales Department at 866-DRY-PUMP (866-379-7867)