OMNI® Helium Compressors
OMNI® Helium Gas Compressors drive Sumitomo Marathon® Cryopumps, CTI CryoTorr®, CTI OnBoard® and Trillium CryoPlex® Cryopumps on the same tool at the same time. Compressing Helium requires specially built compressors, and OMNI® has the solution.
OMNI® Helium Compressors integrate Sumitomo Cryogenics Marathon® Cryopumps with other systems to provide OEM and end users with new possibilities in deep vacuum system performance, value, and support.
OMNI® Helium Compressors are excellent replacement units for legacy helium compressors in coating, 200mm semiconductor and a variety of other R&D and industrial applications. These helium compressors are Ideal for single pump and multiple pump systems and provide enhanced flow rates.
Features of OMNI® Helium Compressors
- OMNI® Helium compressors are proudly made in the USA
- OMNI® Helium compressors can run multiple cryogenic pumps simultaneously on the same tool, including Sumitomo Marathon®, CTI CryoTorr®, CTI OnBoard®, Trillium CryoPlex®, and more.
- OMNI® Helium compressors drive standard pumps and auto-regen pumps at the same time.
- OMNI® Helium compressors easily drive 2-phase or 3-phase cryopumps via a flip of a switch.
- OMNI® Helium compressors can operate Cryo-Torr® and On-Board® cryopumps at the same time.
- OMNI® Helium compressors have the electrical components, communication components, and helium supply components to simultaneously operate cryogenic pumps of different manufacturers — either as a singular group by manufacturer, or by mixing cryogenic pumps of multiple manufacturers on the same application.
- OMNI® Helium compressors are available in air-cooled and water-cooled versions.
- Leakage rate for OMNI® Helium Compressors is little to none at less than 0.01 mbar x l/s thanks to enclosed safety valves, gas-tight hoses, and crank cases as well as OMNI® certified leak detection.
Click for a closer look
| Compressor Model | OMNI-100 Air-Cooled | OMNI-100 Water-Cooled | OMNI-800 Air-Cooled | OMNI-800 Water-Cooled | OMNI-900 Air-Cooled Split System Compressor and Cooling Fan Unit designed for outdoors, Control Unit for indoors | OMNI-900 Water-Cooled | OMNI-1000 Water-Cooled |
|---|---|---|---|---|---|---|---|
| Electrical Supply | Single Phase 20 AMP 200-230VAC 50/60 Hz | Single Phase 20 AMP 200-230VAC 50/60 Hz | 3-Phase 25 AMP 200-230VAC 50/60 Hz | 3-Phase 25 AMP 200-230VAC 50/60 Hz | 3-Phase 30 AMP 200-230VAC 50/60 Hz | 3-Phase 30 AMP 200-230VAC 50/60 Hz | 3-Phase 40 AMP 200-230VAC 50/60 Hz |
| Power Consumption | 2.25 kW @ 50 Hz 2.6 kW @ 60 Hz | 2.1 kW @ 50 Hz 2.1 kW @ 60 Hz | 3.6-4.4 @ 50 Hz 4.6-5.4 kW @ 60 Hz | 3.6-4.3 @ 50 Hz 4.6-5.2 kW @ 60 Hz | 7.5-8.0 kW @ 50 Hz 8.5-9.2 kW @ 60 Hz | 6.6-6.9 kW @ 50 Hz 7.5-7.8 kW @ 60 Hz | 6.7-7.2 kW @ 50Hz 7.5-8.5 kW @ 60 Hz |
| Ambient Temperature | 4- 40°C: (40 -104F) | 4- 40°C: (40 -90F) | 4-38°C (40-100°F) | 4-40°C (40-104°F) | 5-35°C (41-95°F) Indoor unit 30-45°C (22-113°F) Outdoor unit | 4-40°C (40-104°F) | 4-40°C (40-104°F) |
| Dimensions: HxWxD | 876 x 443 x 453 mm 34.5 x 17.5 x 17.8 in. | 617 x 443 x 453 mm 24.3 x 17.5 x 17.8 in. | 889 x 442 x 493 mm 35 x 17.4 x 19.4 in. | 624 x 444.5 x 528.4 mm 24.6 x 17.5 x 20.8 in | 24.8 x 10.6 x 22.4 in. Indoor ???? Outdoor | 624 x 444.5 x 528.4 mm 24.6 x 17.5 x 20.8 in. | 625 x 444.5 x 528.4 mm 24.6 x 17.5 x 20.8 in. |
| Weight | 102 kg (225 lbs) | 82 kg (180 lbs) | 110 kg (242 lbs) | 96 kg (212 lbs) | 45 kg (95 lbs) Indoor unit 115 kg (254 lbs) Outdoor unit | 100 kg (220 lbs) | 101 kg (220 lbs) |
| Adsorber Change | 30,000 hrs. (~ 42 mo.) | 30,000 hrs. (~ 42 mo.) | 30,000 hrs. (~ 42 mo.) | 30,000 hrs. (~ 42 mo.) | 30,000 hrs. (~ 42 mo.) | 30,000 hrs. (~ 42 mo.) | 30,000 hrs. (~ 42 mo.) |
For pricing and answers to your questions, please call our Sales Department at 866-DRY-PUMP (866-379-7867)
Want to gain a deeper understanding of how our OMNI Helium Compressors run multiple cryogenic pumps, from multiple manufacturers, on the same tool at the same time?
Download this FREE PDF or watch our OMNI® Solutions Video.
