OMNI® Helium Compressors
What an OMNI® Helium Compressor Does
An OMNI® Helium Compressor is a USA-made helium compressor that drives cryopumps from multiple manufacturers on the same tool simultaneously. It powers Sumitomo Marathon® cryopumps, CTI Cryo-Torr®, CTI On-Board®, and Trillium Cryo-Plex® cryopumps, so a facility can replace a legacy compressor and upgrade cryopumps one at a time instead of swapping out an entire system at once. OMNI® compressors run standard and auto-regen pumps, support 2-phase and 3-phase pumps, and are available in air-cooled and water-cooled versions.
OMNI® Helium Compressors integrate Sumitomo Marathon® Cryopumps with other cryopump systems to provide OEM and end user with new possibilities in system performance, value and support.
For end users, OMNI® Helium Compressors are excellent replacement units for legacy helium compressors in coating, 200mm semiconductor and a variety of other industrial and R&D applications. OMNI® Helium Compressors drive Sumitomo Marathon® Cryopumps, CTI CryoTorr®, CTI OnBoard® and Trillium CryoPlex® Cryopumps on the same tool at the same time.
- OMNI® compressors are made in the USA
- OMNI® compressors drive multiple cryogenic pumps, made by different manufacturers, at the same time on the same tool.
- OMNI® compressors drive standard pumps and auto-regen pumps at the same time.
- OMNI® compressors have the electrical components, communication components, and helium supply components to simultaneously operate cryogenic pumps of different manufacturers — either as a singular group by manufacturer, or by mixing cryogenic pumps of multiple manufacturers on the same application.
- OMNI® compressors are available in air-cooled and water-cooled versions.
What Legacy Compressors Does the OMNI® Replace?
Use this table to find the OMNI® model that replaces a specific legacy compressor. SynSysCo cryogenic services can confirm the right model for your pump load, power, and cooling setup.
| OMNI® Model | Cooling | Replaces |
|---|---|---|
| OMNI-100 AL | Air-cooled | 8200 (single phase), SCA, Trillium M125 |
| OMNI-100 WL | Water-cooled | 8200 (single phase), SCW, M250 |
| OMNI-800 AL | Air-cooled | 8200 (3-phase) |
| OMNI-800 WL | Water-cooled | 8200 (3-phase), M350 |
| OMNI-900 AL | Air-cooled | 1020R, M600 |
| OMNI-900 WL | Water-cooled | 9600, 8600, 8500, 8510, 1020, M600 |
| OMNI-1000 WL | Water-cooled | 9700, M700 |
Cryo-Plex is a registered trademark of Trillium US Inc. On-Board and Cryo-Torr are registered trademarks of Edwards Vacuum Inc. Marathon is a registered trademark of Sumitomo (SHI) Cryogenics of America, Inc.
Run Cryopumps From Different Manufacturers on One Tool
One OMNI® Helium Compressor can drive CTI, Sumitomo, and Trillium cryopumps on the same tool at the same time. Because the compressor is not tied to a single pump brand, you can replace a legacy Edwards CTI compressor first, then upgrade individual cryopumps one at a time as budget and process needs allow, instead of replacing a full multi-pump set all at once.
OMNI® Helium Compressor Models and Specifications
| Compressor Model | OMNI-100 Air-Cooled | OMNI-100 Water-Cooled | OMNI-800 Air-Cooled | OMNI-800 Water-Cooled | OMNI-900 Air-Cooled Split System Compressor and Cooling Fan Unit designed for outdoors, Control Unit for indoors | OMNI-900 Water-Cooled | OMNI-1000 Water-Cooled |
|---|---|---|---|---|---|---|---|
| Electrical Supply Requirements | Single Phase 20 AMP CB 200-230VAC 50 or 60 Hz | Single Phase 20 AMP CB 200-230 VAC 50 or 60 Hz | 3-Phase 25 AMP CB 200-230VAC 50/60 Hz | 3-Phase 25 AMP CB 200-230VAC 50/60 Hz | 3-Phase 30 AMP CB 200-230VAC 50/60 Hz | 3-Phase 30 AMP CB 200-230VAC 50/60 Hz | 3-Phase 40 AMP CB 200-230VAC 50/60 Hz |
| Power Consumption | 2.25 kW @ 50 Hz 2.6 kW @ 60 Hz | 2.25 kW @ 50 Hz 2.6 kW @ 60 Hz | 3.6-4.4 @ 50 Hz 4.6-5.4 kW @ 60 Hz | 3.6-4.3 @ 50 Hz 4.6-5.2 kW @ 60 Hz | 7.5-8.0 kW @ 50 Hz 8.5-9.2 kW @ 60 Hz | 6.6-6.9 kW @ 50 Hz 7.5-7.8 kW @ 60 Hz | 6.7-7.2 kW @ 50Hz 7.5-8.5 kW @ 60 Hz |
| Ambient Temperature | 4- 40°C: (40 -104F) | 4- 40°C: (40 -104F) | 4-38°C (40-100°F) | 4-40°C (40-104°F) | 5-35°C (41-95°F) Indoor unit 30-45°C (22-113°F) Outdoor unit | 4-40°C (40-104°F) | 4-40°C (40-104°F) |
| Dimensions: HxWxD | 71 x 453 x 510 mm 28.2 x 17.8 x 20.1 in. | 72 x 453 x 510 mm 24.3 x 17.8 x 18.8 in. | 889 x 442 x 493 mm 35 x 17.4 x 19.4 in. | 624 x 444.5 x 528.4 mm 24.6 x 17.5 x 20.8 in | 24.8 x 10.6 x 22.4 in. Indoor ???? Outdoor | 624 x 444.5 x 528.4 mm 24.6 x 17.5 x 20.8 in. | 625 x 444.5 x 528.4 mm 24.6 x 17.5 x 20.8 in. |
| Weight | 102 kg (225 lbs) | 73 kg (160 lbs) | 110 kg (242 lbs) | 96 kg (212 lbs) | 45 kg (95 lbs) Indoor unit 115 kg (254 lbs) Outdoor unit | 100 kg (220 lbs) | 101 kg (220 lbs) |
| Adsorber Change | 30,000 hrs. (~ 42 mo.) | 30,000 hrs. (~ 42 mo.) | 30,000 hrs. (~ 42 mo.) | 30,000 hrs. (~ 42 mo.) | 30,000 hrs. (~ 42 mo.) | 30,000 hrs. (~ 42 mo.) | 30,000 hrs. (~ 42 mo.) |
For pricing and answers to your questions,
please call our Sales Department at 866-DRY-PUMP (866-379-7867)
Helium Compressor FAQs
Several OMNI® models replace the 8200, depending on your power and cooling. The OMNI-100 (air- or water-cooled) replaces single-phase 8200 units, the OMNI-800 replaces 3-phase 8200 units, and larger 8200-class loads can be served by an OMNI-900. SynSysCo can confirm the right model for your tool.
OMNI® Helium Compressors are a USA-made alternative to legacy Sumitomo helium compressors. An OMNI® unit can drive Sumitomo Marathon® cryopumps alongside CTI and Trillium pumps on the same tool, so you can move off a legacy compressor without replacing your existing pumps. Contact SynSysCo to match an OMNI® model to your current setup.
Yes. OMNI® Helium Compressors are built to drive cryopumps from multiple manufacturers simultaneously on the same tool, including Sumitomo Marathon®, CTI Cryo-Torr®, CTI On-Board®, and Trillium Cryo-Plex® pumps. They can run those pumps as a single group by manufacturer or as a mix in a single application.
An air-cooled OMNI® compressor rejects heat to the surrounding air and does not need a process water loop, which can simplify installation. A water-cooled OMNI® compressor uses a facility cooling water supply and is a good fit where water is available or ambient heat load is a concern. OMNI® offers both in the 100, 800, and 900 series. The 1000 series is water-cooled.
Because an OMNI® Helium Compressor can drive a mix of cryopump brands on the same tool, you can replace one cryopump at a time instead of changing out a full multi-pump set at once. You start with the OMNI® compressor, then upgrade individual pumps on your own schedule as they reach the end of their life or as process needs change.
OMNI® Helium Compressors replace a range of legacy helium compressors, including CTI 8200, 9600, 8600, 8500, 8510, 1020, and 9700 units, the Edwards CTI SC air-cooled and water-cooled units, and Trillium M-series compressors. The correct OMNI® model depends on your pump load and power. See the replacement mapping above or contact SynSysCo.
A cryopump uses compressed, high-purity helium as the working gas for its cold head. The helium compressor supplies pressurized helium and recovers the return gas, allowing the cold head to reach the cryogenic temperatures needed to trap gases and create high vacuum. Without a working compressor, the cryopump cannot cool down or hold vacuum.
Yes. OMNI® Helium Compressors are made and serviced in the USA, with support and service available globally.
OMNI® Helium Compressors come with a standard 2-year warranty and a scheduled 30,000-hour adsorber change, which is about 42 months of continuous 24/7 operation.
Yes. OMNI® Helium Compressors can run standard and auto-regen pumps simultaneously and support both 2-phase and 3-phase cryopump motors. Auto-regen configurations use the CRYO H&I GEN Series controller or the Sumitomo MCC controller.