Marathon CP-16 Cryopump

Marathon® CP-16 Cryopump

Marathon® CP Series Cryopumps are specifically designed to meet the needs of high vacuum processes. Applications range from custom laboratory equipment to industrial-scale tools.  Makers of semiconductor devices, flat panel displays, test equipment, solar manufacturing and coating and thermal vacuum systems require efficient, robust and reliable systems with a low cost of ownership.  The Marathon® CP Series of Cryopumps delivers on these needs.

Available Configurations

  • All Industry-Standard Flanges
  • Standard Manual Operation
  • Optional Fully-Automated Operation with Marathon® Cryopump Controller
  • Displex® and Whisper® Technology

Standard Scope of Supply

  • CP-16 Cryopump
  • HC-8E4 or F-70L/H Compressor
  • 3 m (10 ft.) Flexible Gas Lines
  • 3 m (10 ft.) Cold Head Cable
  • Tool Kit
Cryopump ModelCP-16
Air(liters/second)4,800
Water(liters/second)17,300
Argon(liters/second)4,100
Hydrogen(liters/second)12,000
Argon Throughput(torr liters/second)11.4
(sccm)900
Argon Capacity(standard liters @ 1 x10-6 torr)5,500
Hydrogen Capacity(standard liters @ 5 x10-6 torr)50
Crossover Rating(torr-liters)500
Cooldown Time(minutes)135
Weightkg (lbs)49.9 (110)

OPTIONS

HC-4E
HC-8E
F-70
Zephyr
Cryopump ModelCP-16

For pricing and answers to your questions, please call our Sales Department at 866-DRY-PUMP (866-379-7867)

Want to gain a deeper understanding of how our OMNI Helium Compressors run multiple cryogenic pumps, from multiple manufacturers, on the same tool at the same time?

Download this FREE PDF or watch our OMNI® Solutions Video.