OMNI® Helium Compressors & Cryogenic Systems
Global source for cryogenic system upgrades and support in 200mm Semiconductor, PVD, R&D, and Industrial Processes
OMNI® HELIUM COMPRESSORS REPLACE THE FOLLOWING COMPRESSOR MODELS
- SynSysCo’s OMNI system replaces the need for multiple compressors, pumps, and control systems, allowing you to upgrade cryogenic components individually.
- It integrates multiple cryogenic pumps, regardless of manufacturer, to run simultaneously on the same tool.
OMNI® Helium Compressors
OMNI® Helium Compressors empower End Users and OEMs to upgrade cryogenic pumps and compressors, one item at a time, thus not requiring a full system equipment change.
- Drive 2-phase or 3-phase pumps.
- Drive standard pumps and auto-regen pumps at the same time.
- Employ Sumitomo helium compressor technology with 25,000+ installations globally.
- Enable the cross migration of cryopump platforms one pump at a time.
- Available in air-cooled and water-cooled versions.
- Very quiet smooth operation.
- Made in the USA.
- 2-year warranty.
- Replace an Edwards – CTI 9700 or Trillium 700 with an OMNI-1000 or OMNI-900
- Replace an Edwards CTI 9600 or Trillium 600 with an OMNI-900
- Replace an Edwards – CTI 8600, 8500, 8510, 1020 with an OMNI-900
- Replace an Edwards – CTI 8200 or a Trillium M350 with an OMNI-800
- Replace an Edwards – CTI SC or a Trillium M125 or M250 with an OMNI-100
OMNI® Cryogenic Systems and Marathon® Cryogenic Pumps
SynSysCo provides the full line of Sumitomo Marathon® cryogenic pumps to support any application. From Semiconductor Ion Implant, Furnace and PVD to Space Simulation, Coating and R&D Sumitomo has a series of pumps that integrate with an OMNI® Cryogenic System to meet the need.
OMNI® Cryogenic Systems and Kashiyama Dry Roughing Pumps
SynSysCo provides the full line of Kashiyama dry pumps to support any application. From Space Simulation, to PVD, Etch, CVD, and ALD, Kashiyama has a series of pumps specifically designed to meet the need.
By adding in our vacuum gauges and fittings products we provide you with a full complement of pumps and accessories for your vacuum applications.
Testimonials
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