Marathon CP-8LP Cryopump
Marathon® CP Series Cryopumps are specifically designed to meet the needs of high vacuum processes. Applications range from custom laboratory equipment to industrial-scale tools. Makers of semiconductor devices, flat panel displays, test equipment, solar manufacturing and coating and thermal vacuum systems require efficient, robust and reliable systems with a low cost of ownership. The Marathon® CP Series of Cryopumps delivers on these needs.
Available Configurations
- Standard Low Profile Design in Left or Right Hand Configurations
- All Industry-Standard Flanges
- Standard Manual Operation
- Optional Fully-Automated Operation with Marathon® Cryopump Controller
- Two (2) cryopumps operating with one (1) HC-8E4 or F-70L/H Compressor
- Displex® Technology
Standard Scope of Supply
- CP-8LP Cryopump
- Zephyr®, HC-4E1, HC-8E4 or F-70L/H Compressor
- 3 m (10 ft.) Flexible Gas Lines
- 3 m (10 ft.) Cold Head Cable
- Tool Kit
| Cryopump Model | CP-8LP | |
|---|---|---|
| Air | (liters/second) | 1,800 |
| Water | (liters/second) | 4,200 |
| Argon | (liters/second) | 1,500 |
| Hydrogen | (liters/second) | 3,000 |
| Argon Throughput | (torr liters/second) | 11 |
| (sccm) | 870 | |
| Argon Capacity | (standard liters @ 1 x10-6 torr) | 1,600 |
| Hydrogen Capacity | (standard liters @ 5 x10-6 torr) | 23 |
| Crossover Rating | (torr-liters) | 220 |
| Cooldown Time | (minutes) | 110 |
| Weight | kg (lbs) | 17.9 (39.5) |
OPTIONS |
||
| HC-4E | ||
| HC-8E | ||
| F-70 | ||
| Zephyr | ||
| Cryopump Model | CP-8LP | |
For pricing and answers to your questions,
please call our Sales Department at 866-DRY-PUMP (866-379-7867)
