Marathon Cryopumps

A Marathon® Keeps You Running Longer… and OMNI® Helium Compressors Run Marathon® Pumps!

  • Made in the USA:
    • Marathon® cryopumps are manufactured by Sumitomo Corporation of America in Allentown, Pennsylvania, USA.
  • Whisper™ Quiet Technology:
    • Provides quiet, low vibration operation combined with world–class performance and reliability. Global OEMs and End Users choose Marathon® for the most demanding semiconductor, coating, flat panel and R&D applications.
  • World-Class Performance:
    • Industry-leading carrying capacities and extended regen times provide very flat pumping speed curves to maintain chamber performance and pressures.
  • Versatile Application:
    • OMNI® Helium Compressors drive Marathon® cryopumps which are available from 8 inches to 20 inches and with standard or auto-regen capabilities.
  • Global Support:
    • Service, maintenance, parts and support are available through seven global locations.

Cryopump ModelCP-8CP-8LPCP-250LPCP-12CP-16CP-20
Argon Throughput(torr liters/second)
Argon Capacity(standard liters @ 1 x10-6 torr)1,2001,6001,6003,1005,5006,000
Hydrogen Capacity(standard liters @ 5 x10-6 torr)252330505033
Crossover Rating(torr-liters)220220300650500400
Cooldown Time(minutes)7511011090135190
Weightkg (lbs)16.8 (37)17.9 (39.5)20 (44)40.8 (90)49.9 (110)77.1 (170)

For pricing and answers to your questions,
please call our Sales Department at 866-DRY-PUMP (866-379-7867)