Marathon Cryopumps
A Marathon® Keeps You Running Longer… and OMNI Compressors Run Marathon® Pumps!
Made in the USA: Marathon® cryopumps are manufactured by Sumitomo Heavy Industries in Allentown, Pennsylvania, USA.
Whisper™ Quiet Technology: Provides quiet, low vibration, pneumatic operation combined with world–class performance and reliability. Global OEMs choose Marathon® for MRI helium re-liquefaction and the most demanding coating, flat panel and R&D applications.
Hot Swap: In-situ displacer changes enable end-users to conduct helium-side maintenance in about 45 to 60 minutes without removing the pump and without breaking vacuum.
World-Class Performance: Industry-leading carrying capacities extend regen times. Very flat pumping speed curves between regens maintain chamber performance and pressures.
Versatile Application: Marathon® cryopumps are driven by OMNI® compressors and by Marathon® compressors. Pump models are available from 8 inches to 20 inches, with standard and auto-regen capabilities. OMNI® helium compressors also drive CTI CryoTorr® and CTI OnBoard® cryopumps, Ulvac Cryo-U® Series cryopumps, and Trillium Cryo-Plex® cryopumps.
Global Support: Service, maintenance, parts and support are available through nine (9) locations globally.
| Cryopump Model | CP-8 | CP-8LP | CP-250LP | CP-12 | CP-16 | CP-20 | |
|---|---|---|---|---|---|---|---|
| Air | (liters/second) | 1,500 | 1,800 | 3,000 | 3,600 | 4,800 | 9,700 |
| Water | (liters/second) | 4,200 | 4,200 | 6,300 | 9,560 | 17,300 | 29,100 |
| Argon | (liters/second) | 1,250 | 1,500 | 2,500 | 3,100 | 4,100 | 8,300 |
| Hydrogen | (liters/second) | 2,300 | 3,000 | 5,000 | 7,300 | 12,000 | 14,000 |
| Argon Throughput | (torr liters/second) | 11.0 | 11.0 | 11.0 | 12.6 | 11.4 | 11.3 |
| (sccm) | 870 | 870 | 870 | 1,000 | 900 | 895 | |
| Argon Capacity | (standard liters @ 1 x10-6 torr) | 1,200 | 1,600 | 1,600 | 3,100 | 5,500 | 6,000 |
| Hydrogen Capacity | (standard liters @ 5 x10-6 torr) | 25 | 23 | 30 | 50 | 50 | 33 |
| Crossover Rating | (torr-liters) | 220 | 220 | 300 | 650 | 500 | 400 |
| Cooldown Time | (minutes) | 75 | 110 | 110 | 90 | 135 | 190 |
| Weight | kg (lbs) | 16.8 (37) | 17.9 (39.5) | 20 (44) | 40.8 (90) | 49.9 (110) | 77.1 (170) |
OPTIONS |
|||||||
| HC-4E | |||||||
| HC-8E | |||||||
| F-70 | |||||||
| Zephyr | |||||||
| Cryopump Model | CP-8 | CP-8LP | CP-250LP | CP-12 | CP-16 | CP-20 | |
For pricing and answers to your questions, please call our Sales Department at 866-DRY-PUMP (866-379-7867)
Want to gain a deeper understanding of how our OMNI Helium Compressors run multiple cryogenic pumps, from multiple manufacturers, on the same tool at the same time?
Download this FREE PDF or watch our OMNI® Solutions Video.
