Marathon Cryopumps
A Marathon® Keeps You Running Longer… and OMNI® Helium Compressors Run Marathon® Pumps!
- Made in the USA:
- Marathon® cryopumps are manufactured by Sumitomo Corporation of America in Allentown, Pennsylvania, USA.
- Whisper™ Quiet Technology:
- Provides quiet, low vibration operation combined with world–class performance and reliability. Global OEMs and End Users choose Marathon® for the most demanding semiconductor, coating, flat panel and R&D applications.
- World-Class Performance:
- Industry-leading carrying capacities and extended regen times provide very flat pumping speed curves to maintain chamber performance and pressures.
- Versatile Application:
- OMNI® Helium Compressors drive Marathon® cryopumps which are available from 8 inches to 20 inches and with standard or auto-regen capabilities.
- Global Support:
- Service, maintenance, parts and support are available through seven global locations.
| Cryopump Model | CP-8 | CP-8LP | CP-250LP | CP-12 | CP-16 | CP-20 | |
|---|---|---|---|---|---|---|---|
| Air | (liters/second) | 1,500 | 1,800 | 3,000 | 3,600 | 4,800 | 9,700 |
| Water | (liters/second) | 4,200 | 4,200 | 6,300 | 9,560 | 17,300 | 29,100 |
| Argon | (liters/second) | 1,250 | 1,500 | 2,500 | 3,100 | 4,100 | 8,300 |
| Hydrogen | (liters/second) | 2,300 | 3,000 | 5,000 | 7,300 | 12,000 | 14,000 |
| Argon Throughput | (torr liters/second) | 11.0 | 11.0 | 11.0 | 12.6 | 11.4 | 11.3 |
| (sccm) | 870 | 870 | 870 | 1,000 | 900 | 895 | |
| Argon Capacity | (standard liters @ 1 x10-6 torr) | 1,200 | 1,600 | 1,600 | 3,100 | 5,500 | 6,000 |
| Hydrogen Capacity | (standard liters @ 5 x10-6 torr) | 25 | 23 | 30 | 50 | 50 | 33 |
| Crossover Rating | (torr-liters) | 220 | 220 | 300 | 650 | 500 | 400 |
| Cooldown Time | (minutes) | 75 | 110 | 110 | 90 | 135 | 190 |
| Weight | kg (lbs) | 16.8 (37) | 17.9 (39.5) | 20 (44) | 40.8 (90) | 49.9 (110) | 77.1 (170) |
For pricing and answers to your questions,
please call our Sales Department at 866-DRY-PUMP (866-379-7867)