Marathon Cryopumps
A Marathon® Keeps You Running Longer… and OMNI Compressors Run Marathon® Pumps!
Made in the USA: Marathon® cryopumps are manufactured by Sumitomo Heavy Industries in Allentown, Pennsylvania, USA.
Whisper™ Quiet Technology: Provides quiet, low vibration, pneumatic operation combined with world–class performance and reliability. Global OEMs choose Marathon® for MRI helium re-liquefaction and the most demanding coating, flat panel and R&D applications.
Hot Swap: In-situ displacer changes enable end-users to conduct helium-side maintenance in about 45 to 60 minutes without removing the pump and without breaking vacuum.
World-Class Performance: Industry-leading carrying capacities extend regen times. Very flat pumping speed curves between regens maintain chamber performance and pressures.
Versatile Application: Marathon® cryopumps are driven by OMNI® compressors and by Marathon® compressors. Pump models are available from 8 inches to 20 inches, with standard and auto-regen capabilities. OMNI® helium compressors also drive CTI CryoTorr® and CTI OnBoard® cryopumps, Ulvac Cryo-U® Series cryopumps, and Trillium Cryo-Plex® cryopumps.
Global Support: Service, maintenance, parts and support are available through nine (9) locations globally.
Cryopump Model | CP-8 | CP-8LP | CP-250LP | CP-12 | CP-16 | CP-20 | |
---|---|---|---|---|---|---|---|
Air | (liters/second) | 1,500 | 1,800 | 3,000 | 3,600 | 4,800 | 9,700 |
Water | (liters/second) | 4,200 | 4,200 | 6,300 | 9,560 | 17,300 | 29,100 |
Argon | (liters/second) | 1,250 | 1,500 | 2,500 | 3,100 | 4,100 | 8,300 |
Hydrogen | (liters/second) | 2,300 | 3,000 | 5,000 | 7,300 | 12,000 | 14,000 |
Argon Throughput | (torr liters/second) | 11.0 | 11.0 | 11.0 | 12.6 | 11.4 | 11.3 |
(sccm) | 870 | 870 | 870 | 1,000 | 900 | 895 | |
Argon Capacity | (standard liters @ 1 x10-6 torr) | 1,200 | 1,600 | 1,600 | 3,100 | 5,500 | 6,000 |
Hydrogen Capacity | (standard liters @ 5 x10-6 torr) | 25 | 23 | 30 | 50 | 50 | 33 |
Crossover Rating | (torr-liters) | 220 | 220 | 300 | 650 | 500 | 400 |
Cooldown Time | (minutes) | 75 | 110 | 110 | 90 | 135 | 190 |
Weight | kg (lbs) | 16.8 (37) | 17.9 (39.5) | 20 (44) | 40.8 (90) | 49.9 (110) | 77.1 (170) |
OPTIONS |
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HC-4E | |||||||
HC-8E | |||||||
F-70 | |||||||
Zephyr | |||||||
Cryopump Model | CP-8 | CP-8LP | CP-250LP | CP-12 | CP-16 | CP-20 |
For pricing and answers to your questions,
please call our Sales Department at 866-DRY-PUMP (866-379-7867)