Marathon CP-12 Cryopump

Marathon CP-12 Cryopump

Marathon® CP Series Cryopumps are specifically designed to meet the needs of high vacuum processes. Applications range from custom laboratory equipment to industrial-scale tools.  Makers of semiconductor devices, flat panel displays, test equipment, solar manufacturing and coating and thermal vacuum systems require efficient, robust and reliable systems with a low cost of ownership.  The Marathon® CP Series of Cryopumps delivers on these needs.

Available Configurations

  • All Industry-Standard Flanges
  • Standard Manual Operation
  • Optional Fully-Automated Operation with Marathon® Cryopump Controller
  • Displex® and Whisper® Technology

Standard Scope of Supply

  • CP-12 Cryopump
  • HC-8E4 or F-70L/H Compressor
  • 3 m (10 ft.) Flexible Gas Lines
  • 3 m (10 ft.) Cold Head Cable
  • Tool Kit
Cryopump ModelCP-12
Argon Throughput(torr liters/second)12.6
Argon Capacity(standard liters @ 1 x10-6 torr)3,100
Hydrogen Capacity(standard liters @ 5 x10-6 torr)50
Crossover Rating(torr-liters)650
Cooldown Time(minutes)90
Weightkg (lbs)40.8 (90)
Cryopump ModelCP-12
OMNI® Helium Compressor Options
OMNI® Helium CompressorCP-8CP-8LPCP-250LPCP-12CP-16CP-20
OMNI® 10003-43-43221
OMNI® Helium 9002-32-32111
OMNI® Helium 80021111N/A
OMNI® Helium 10011N/AN/AN/AN/A

For pricing and answers to your questions,
please call our Sales Department at 866-DRY-PUMP (866-379-7867)