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Marathon CP-20 Cryopump
Marathon® CP Series Cryopumps are specifically designed to meet the needs of high vacuum processes. Applications range from custom laboratory equipment to industrial-scale tools. Makers of semiconductor devices, flat panel displays, test equipment, solar manufacturing and coating and thermal vacuum systems require efficient, robust and reliable systems with a low cost of ownership. The Marathon® CP Series of Cryopumps delivers on these needs.
Available Configurations
- All Industry-Standard Flanges
- Standard Manual Operation
- Optional Fully-Automated Operation with Marathon® Cryopump Controller
- Displex® and Whisper® Technology
Standard Scope of Supply
- CP-20 Cryopump
- F-70L/H Compressor
- 3 m (10 ft.) Flexible Gas Lines
- 3 m (10 ft.) Cold Head Cable
- Tool Kit
| Cryopump Model | CP-20 | |
|---|---|---|
| Air | (liters/second) | 9,700 |
| Water | (liters/second) | 29,100 |
| Argon | (liters/second) | 8,300 |
| Hydrogen | (liters/second) | 14,000 |
| Argon Throughput | (torr liters/second) | 11.3 |
| (sccm) | 895 | |
| Argon Capacity | (standard liters @ 1 x10-6 torr) | 6,000 |
| Hydrogen Capacity | (standard liters @ 5 x10-6 torr) | 33 |
| Crossover Rating | (torr-liters) | 400 |
| Cooldown Time | (minutes) | 190 |
| Weight | kg (lbs) | 77.1 (170) |
| Cryopump Model | CP-20 | |
| OMNI® Helium Compressor Options | ||||||
|---|---|---|---|---|---|---|
| OMNI® Helium Compressor | CP-8 | CP-8LP | CP-250LP | CP-12 | CP-16 | CP-20 |
| OMNI® 1000 | 3-4 | 3-4 | 3 | 2 | 2 | 1 |
| OMNI® Helium 900 | 2-3 | 2-3 | 2 | 1 | 1 | 1 |
| OMNI® Helium 800 | 2 | 1 | 1 | 1 | 1 | N/A |
| OMNI® Helium 100 | 1 | 1 | N/A | N/A | N/A | N/A |
For pricing and answers to your questions,
please call our Sales Department at 866-DRY-PUMP (866-379-7867)