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Marathon CP-20 Cryopump
Marathon® CP Series Cryopumps are specifically designed to meet the needs of high vacuum processes. Applications range from custom laboratory equipment to industrial-scale tools. Makers of semiconductor devices, flat panel displays, test equipment, solar manufacturing and coating and thermal vacuum systems require efficient, robust and reliable systems with a low cost of ownership. The Marathon® CP Series of Cryopumps delivers on these needs.
Available Configurations
- All Industry-Standard Flanges
- Standard Manual Operation
- Optional Fully-Automated Operation with Marathon® Cryopump Controller
- Displex® and Whisper® Technology
Standard Scope of Supply
- CP-20 Cryopump
- F-70L/H Compressor
- 3 m (10 ft.) Flexible Gas Lines
- 3 m (10 ft.) Cold Head Cable
- Tool Kit
| Cryopump Model | CP-20 | |
|---|---|---|
| Air | (liters/second) | 9,700 |
| Water | (liters/second) | 29,100 |
| Argon | (liters/second) | 8,300 |
| Hydrogen | (liters/second) | 14,000 |
| Argon Throughput | (torr liters/second) | 11.3 |
| (sccm) | 895 | |
| Argon Capacity | (standard liters @ 1 x10-6 torr) | 6,000 |
| Hydrogen Capacity | (standard liters @ 5 x10-6 torr) | 33 |
| Crossover Rating | (torr-liters) | 400 |
| Cooldown Time | (minutes) | 190 |
| Weight | kg (lbs) | 77.1 (170) |
OPTIONS |
||
| HC-4E | ||
| HC-8E | ||
| F-70 | ||
| Zephyr | ||
| Cryopump Model | CP-20 | |
For pricing and answers to your questions, please call our Sales Department at 866-DRY-PUMP (866-379-7867)
Want to gain a deeper understanding of how our OMNI Helium Compressors run multiple cryogenic pumps, from multiple manufacturers, on the same tool at the same time?
Download this FREE PDF or watch our OMNI® Solutions Video.
