Magnetically Levitated Turbo Molecular Pump
Excellent Pumping Performance
High pumping efficiency is achieved by applying rarefied gas flow analysis and structure analysis technology. In spite of the simple and compact design, these models provide excellent pumping performance. The lightweight pump and half rack sized digitally controlled power supply unit will contribute to the miniaturization of equipment at customers.
Network Connection Enabled
Equipped with RS-232C and RS-485-compatible serial communication ports, which enable operations to start/stop the TMP, monitor operational status, and read out the operational log. Thanks to the optional monitor software, up to 32 TMPs can be monitored using a single computer via RS-485 communications.
Thanks to the rotor coating and pump temperature control, the pump is fully protected from by-products generated by semiconductor and LCD etching process. (Please contact us for the detailed specifications.)
Compact and Highly Functional
All the pumps in the 03 series and 04 series can be supported by two types (for small TMP and large TMP) of power supplies. In addition, they can be operated without adjustment procedures even when the combination of pumps, power supplies, and cables (3 to 30 m in length) is changed.
For pricing and answer to your questions, please call our Sales Department at 866-DRY-PUMP (866-379-7867)