At SynSysCo, we provide quality performance products with ultimate vacuum pressure measured in levels of Torr (mbar). Our Kashiyama Dry Multilobe Roughing Pumps offer optimal pumping speeds, high flow rates and long-lasting operating hours to cover the most vibration sensitive analytical applications to the most aggressive Semiconductor applications.
Where Oil-Free Vacuum Pumps Are Used
Our oil-free pumps are used in a wide range of industries and applications that require the removal of fluids, waste, gases, chemicals, and other various materials.
Semiconductor
In the semiconductor industry, these pumps are commonly used for ion implantation and Thin Film processing.
Medical
In the medical industry, they are used for applications such as vacuum-assisted biopsy and sterilization.
Other Industries
Other industries that utilize oil-free vacuum pumps include food and beverage processing, pharmaceuticals, and research and development.
Benefits of Oil-Free Vacuum Pumps
Environmental Benefits
Using oil-free vacuum pumps provides significant environmental benefits. Since these pumps do not require oil for operation, there is no need for frequent oil changes or disposal, which leads to reduced waste and cost savings. The pumps do not emit oil mist or vapor, so they provide a cleaner working environment and reduce the risk of air pollution.
Energy Efficiency
Oil-free vacuum pumps are energy-efficient, resulting in reduced energy consumption and greenhouse gas emissions. Overall, these types of pumps offer a sustainable solution for various industrial processes while also promoting a cleaner and healthier environment for everyone.
Choosing Dry Roughing Vacuum Pumps From SynSysCo
Our wide assortment of dry vacuum pumps offer very low noise levels, deep base pressure, low power consumption, and low vibration.
Here is an application summary for our Kashiyama Dry Roughing Pumps:
| Usage (Examples) | Series | Features |
Pumping Speed (L/min)
100
500
1,000
5,000
10,000
20,000
30,000
50,000
100,000
|
|
|---|---|---|---|---|
| Semiconductor FPD Solar Cell |
Harsh Process (CVD, ALD, etc.) |
SD | Unique Screw Structure High Process Resistance |
|
| SDE | ||||
| Medium Process (Etch, etc.) |
MU | Energy Saving Corrosion Resistance |
||
| MU-PE/HE | ||||
| Light Process (Load Lock, PVD, etc.) |
MU-XE | Energy Saving Space Saving |
||
| FPD Solvent Exhaust | SDL | High Speed Exhaust | ||
| Chemical Instruments, Analytical Instruments, Research & Development, Semiconductor, Medical & Food, Others (Drying, Layered, Transmission, Packaging, etc.) |
NeoDry G | Air-cooled Type Low Noise, Low Vibration Long Life |
||
| NeoDry E | ||||
Product guide courtesy of Kashiyama-USA, Inc. Select a series to view the pumps.
Browse Our Oil-Free Vacuum Pumps
For more information, or to browse our collection of oil-free vacuum pumps, click any of the links below:
Talk to SynSysCo Sales
For pricing and more information, please call our Sales Department at 866-DRY-PUMP (866-379-7867).
Oil-Free Vacuum Pump FAQs
Answers to the questions engineers, lab teams, and fab technicians ask most when choosing a dry roughing pump.
The NeoDry 7, 15, 30 and 36 E-series models were superseded by the G-series in 2021. SynSysCo still provides maintenance and repair for the 7E, 15E, 30E, 36E, 60E and 300E, and can help you move to the matching G-series model when replacement makes more sense.
Yes. SynSysCo is an authorized rebuild center for NeoDry multilobe pumps and offers service, maintenance, repair, rebuilds and parts. Sites with 20 or more pump repairs per year can join the Premier program, which offers exclusive pricing, warranties and spare pump backup services.
Every NeoDry model has gas ballast available with N2 or air, and the series offers an air or N2 purge option for more aggressive applications. Allowable moisture ranges from 135 grams per hour on the 7G up to 600 grams per hour on the 60E, 100E and 300E. For corrosive or deposition-heavy processes, the MU-H (with hot N2 purge) or SDE-TX series may be a better fit.
NeoDry G-series pumps run on single-phase 100-240 VAC, and the E-series on 200-240 VAC single-phase or three-phase. The MU-X and MU-P/H series use 3-phase 200-220 VAC at 50/60 Hz, and the SDE-TX series is offered in 3-phase 200-220 VAC or 380-480 VAC. Contact SynSysCo for other voltage options.
Kashiyama NeoDry multilobe pumps have no tip seals, so they avoid the tip seal swelling issues seen in dry scroll pumps. They also run oil-free, so there are no oil changes or oil mist. SynSysCo can help you match a NeoDry model to the pumping speed and base pressure your tool needs.
Ultimate vacuum for the NeoDry 15G and 30G is 1.0 Pa (7.5 mTorr) or lower, 0.7 Pa (5.2 mTorr) for the 36G, and 0.5 Pa (3.75 mTorr) for the 300E. The water-cooled MU-X series reaches 0.5 Pa on the MU300X and larger models, measured without N2 purge.
The NeoDry 7G, 15G and 30G are rated at 45 dB(A) or less, and the 36G at 51 dB(A) or less. The larger 60E and 100E are rated at 60 dB(A) or less, and the 300E at 72 dB(A) or less.
The Kashiyama NeoDry series is air-cooled and does not require cooling water or nitrogen purge. The NeoDry G-series (7G, 15G, 30G and 36G) runs on single-phase 100-240 VAC. The MU-X, MU-P/H and SDE-TX lines are water-cooled.
For clean, light-duty work, the air-cooled NeoDry series is used on load locks, PVD systems, analytical instruments and electron microscopes, and the water-cooled MU-X series is built for clean pumping such as load lock and transfer chambers. The MU-P/H series covers light to medium duty processes, and the SDE-TX series is designed for harsh duty, with a vertical screw that is durable against deposits. For medium or harsh processes, contact SynSysCo with your process gases before selecting a model.