Kashiyama SDE Series
Large Capacity SDE Series: Standard type for harsh process
Available up to 200kL/min.
Best for large wafer and FPD.
Durable to various processes.
| Specifications/Products*1 | SDE1220 | SDE20M20 | SDE30M20 | SDE4060 | SDE4030M20 | SDE8060 | SDE804060 |
|---|---|---|---|---|---|---|---|
| Max Pumping Speed [L/min]*2 | 20,000 | 30,000 | 50,000 | 60,000 | 80,000 | 120,000 | 190,000 |
| Ultimate pressure [Pa]*2 | 0.5 | 0.5 | 0.5 | 0.8 | 0.5 | 0.8 | 0.5 |
| Supply Voltage (50/60Hz) | 3Phase AC200～220V, 380～480V (all models) | ||||||
| Dimensions [mm] W*H*L*3 | W:400 H:780 L:930 | W:450 H:950 L:1000 | W:450 H:950 L:1000 | W:750 H:1200 L:1600 | W:800 H:1580 L:1320 | W:850 H:1220 L:1600 | W:1000 H:1980 L:1850 |
| *1 Smaller than 20,000L/min pumps are also available. *2 Without N2 purge. *3 Package size. Dimensions vary by specification. * Contact us about international standard compliance. Specifications and name of products are subject to change without prior notice. |
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For pricing and answer to your questions, please call our Sales Department at 866-DRY-PUMP (866-379-7867)