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Marathon CP-250LP Cryopump
Marathon® CP Series Cryopumps are specifically designed to meet the needs of high vacuum processes. Applications range from custom laboratory equipment to industrial-scale tools. Makers of semiconductor devices, flat panel displays, test equipment, solar manufacturing and coating and thermal vacuum systems require efficient, robust and reliable systems with a low cost of ownership. The Marathon® CP Series of Cryopumps delivers on these needs.
Available Configurations
- Standard Low Profile Design in Left or Right Hand Configurations
- All Industry-Standard Flanges
- Standard Manual Operation
- Optional Fully-Automated Operation with Marathon® Cryopump Controller
- Displex® Technology
Standard Scope of Supply
- CP-250LP Cryopump
- 3 m (10 ft.) Flexible Gas Lines
- 3 m (10 ft.) Cold Head Cable
- Tool Kit
Cryopump Model | CP-250LP | |
---|---|---|
Air | (liters/second) | 3,000 |
Water | (liters/second) | 6,300 |
Argon | (liters/second) | 2,500 |
Hydrogen | (liters/second) | 5,000 |
Argon Throughput | (torr liters/second) | 11 |
(sccm) | 870 | |
Argon Capacity | (standard liters @ 1 x10-6 torr) | 1,600 |
Hydrogen Capacity | (standard liters @ 5 x10-6 torr) | 30 |
Crossover Rating | (torr-liters) | 300 |
Cooldown Time | (minutes) | 110 |
Weight | kg (lbs) | 20 (44) |
Cryopump Model | CP-250LP |
OMNI® Helium Compressor Options | ||||||
---|---|---|---|---|---|---|
OMNI® Helium Compressor | CP-8 | CP-8LP | CP-250LP | CP-12 | CP-16 | CP-20 |
OMNI® 1000 | 3-4 | 3-4 | 3 | 2 | 2 | 1 |
OMNI® Helium 900 | 2-3 | 2-3 | 2 | 1 | 1 | 1 |
OMNI® Helium 800 | 2 | 1 | 1 | 1 | 1 | N/A |
OMNI® Helium 100 | 1 | 1 | N/A | N/A | N/A | N/A |
For pricing and answers to your questions,
please call our Sales Department at 866-DRY-PUMP (866-379-7867)