Yes. OMNI® Helium Compressors can run standard and auto-regen pumps simultaneously and support both 2-phase and 3-phase cryopump motors. Auto-regen configurations use the CRYO H&I GEN Series controller or the Sumitomo MCC controller.
Yes. OMNI® Helium Compressors can run standard and auto-regen pumps simultaneously and support both 2-phase and 3-phase cryopump motors. Auto-regen configurations use the CRYO H&I GEN Series controller or the Sumitomo MCC controller.