Anest Iwata ISP-500-VFD

The ISP-500-VFD pump is cool, quiet, and highly efficient due to its unique patented balanced design.

The Benefits of Oil-Free Pumping are many and the Anest Iwata ISP-500 pump may be the immediate solution to oil contamination and disposal issues presented by your existing oil lubricated pumps.

Typical applications for the ISP-500-VFD include:

  • Beam Line
  • Load Locks
  • Sputtering Systems
  • Helium Leak Detectors
Technical DataUnitsAnest Iwata ISP-500C
Anest Iwata ISP-500C
Normal OperationPumping Speed
600 L/min (21.2 CFM)600 L/min (21.2 CFM)
Ultimate Pressure0.7 Pa (5.3x10-3 Torr)0.7 Pa (5.3x10-3 Torr)
Low-Speed OperationPumping Speed
300 L/min (10.6 CFM)300 L/min (10.6 CFM)
Ultimate Pressure3.0 Pa (2.3x10-2 Torr)3.0 Pa (2.3x10-2 Torr)
ControlRemote / Manual controlRemote / Manual control
Remote InterfaceRS-485 /Input contact via D-sub 9-pinRS-485 /Input contact via D-sub 9-pin
Leak Tightness1.0x10-5 Pa • m3/s1.0x10-5 Pa • m3/s
Voltage Input1-phase100-115V200-230V
Noise Level 1m
with air-flush on
60 db (A)
68 db (A)
60 db (A)
68 db (A)
Internal Flange Vibration1.5 mm/s60 db (A)
68 db (A)
Inlet FlangeNW40NW40
Outlet FlangeNW25NW25
Dimensions (LxWxH)Inlet Vertical
476 x 288 x 420 mm
(18.8 x 11.3 x 16.6 in)
476 x 288 x 420 mm
(18.8 x 11.3 x 16.6 in)
Inlet Horizontal476 x 328 x 394 mm
(18.8 x 12.9 x 15.5 in)
476 x 328 x 394 mm
(18.8 x 12.9 x 15.5 in)
Weight44kg (97 lb)44kg (97 lb)

For pricing and answers to your questions, please call our Sales Department at 866-DRY-PUMP (866-379-7867)

Want to gain a deeper understanding of how our OMNI Helium Compressors run multiple cryogenic pumps, from multiple manufacturers, on the same tool at the same time?

Download this FREE PDF or watch our OMNI® Solutions Video.

Anest Iwata ISP-500C VFD

Product Features

  • Remote and local control
  • 2-speed operation
    Note:  In Modbus operation mode, any frequency between 30-60Hz can be selected.
  • 3-year service renewal
    Note:  At low speed 30 Hz operation mode
  • Excellent ultimate pressure